Customizable FOUP/ Cassette Cleaning Machine

MYFC S500
SEMI-AUTO

下載文件 產品查詢

What is FOUP?

FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod. It is a specialized plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be transferred between machines for processing or measurement.

FOUPs were designed with the constraints of 300mm in mind, with the removable cassette being replaced by fins in the FOUP which hold the wafers in place, and the bottom opening door being replaced by a front opening door to allow robot handling mechanisms to access the wafers directly from the FOUP.

FOUPs are available in several colors, depending on the customers wish. FOUPs and IC manufacturing equipment can have a nitrogen atmosphere, in an effort to increase device yield.


FOUP cleaner can improve yield by reducing FOUP contaminations.

  • Remove particles
  • Reduce humidity
  • Reduce AMC
  • Low cross-contamination


MYFC S500 SEMI-AUTO Specifications:

  • Manual load FOUP and auto clean
  • DIW clean/Hot N2 dry/IR dry
  • Rotation cleaning
  • Equipment Class 100
  • DIW heating System
  • ESD and humidity control
  • HEPA
  • Detergent clean*
  • SUS316 chamber for better architecture
  • Ceramics Bearing for rust-free
  • Low vibration during high speed rotation
  • Recipe easy maintenance and more options
  • Pump with higher durability
  • CDA for drying process


  • Single /dual open
  • Clean 8 sets of 12” FOUP/FOSB
  • Customized basket for cleaning variated instrument
  • EMO stop
  • Customized Signal tower