Model 5711 µ Wire Aerobar®

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Similar to the µWire AeroBar 5710, the 5711 is particularly suited for sensitive flat panels where fast discharge times and low swing voltages are desired. The shorter bar length of the 5711 is ideal for space constrained tools in both the flat panel and backend semiconductor processes.

The µWire AeroBar utilizes MicroPulse technology applied to a corona wire system for optimal performance. MicroPulse technology reduces ion recombination at the corona wire, thus increasing product efficiency and performance.

The µWire Bar is optimized for its unique corona wire design which produces more ions than emitter points. The corona wire design also permits the bar to be placed closer to substrates, diminishing the recombination of ions and the resulting "striping effect".



  • Compact Size (150 or 250 mm length)
  • Unique corona wire design (no emitter points)
  • Micropulse high voltage technology
  • Remotely mounted controller for 5711 AeroBar


  • Charge protection for even the most space-limited automation tools
  • Bar mounted close to target without ionization "striping"
  • One swipe cleaning with bar in place
  • Long-term balance stability and discharge time performance
  • Uniform balance over the length of the bar
  • Innovative ionization generation that translates to lower total cost of ownership
  • Convenient access to power input, status lights and remote alarm connection

Typical Decay Time (sec)

µWire AeroBar Model 5711 (250 mm length) with 25 mm Air Jet Spacing. Measured using Simco-Ion CPM Model 280A with CDA flow at 2 lpm per air jet (18 lpm total) and no HEPA flow.


 Input Voltage  24 VDC ± 10%, 12W max
 Output Voltage  Adjustable 13kV pk-pk (typ)
 Balance  <± 25V over the length of the bar
 Working Range  50- 2000 mm, application and specification dependent
 Technology  Micropulse
 Frequency  Factory default at 1 Hz, adjustable from 0.1 - 35 Hz
 Cleanroom Class  ISO 14644-1 Class 2
 Controls  All parameters set via wired handheld terminal (HHT) by either
 wired connection or IR control to the 5711-CTRL Controller
 Indicators  Power - Green; Communication -Yellow; Alarm - Red; LED
 combinations indicate specific status conditions
 Gas Input  Clean dry air (CDA)
 Gas Pressure  3.45 bar (optimal); 6.2 bar max
 Gas Consumption   150 mm Aero Bar= 10 LPM, overall per bar
 250 mm AeroBar = 18 LPM, overall per bar
 (Recommended flow is 2 LPM per jet orifice)
 EMI Level  Below background level
 Ozone  < 0.05 ppm
 Operating Env.  15 - 35°C, 30- 60% RH (non-condensing)
 Enclosure  5711 AeroBar: ABS Chassis; Stainless Steel Reference Plates
 5711-CTRL Controller: Stainless Steel Chassis
 Dimensions  5711 AeroBar: 7.6H x 3.3W x Length (16 cm or 26 cm)
 5711-CTRL Controller: 11.9H x 4.8W x 8.3D cm

Application Flexibility

The µWire AeroBar can be operated with the factory default settings in "plug-and-play" mode, or optimized for a specific application using the Handheld Terminal. The bar's ability to perform well in either a vertical or horizontal position along with the µWire AeroBar low profile height and length design makes it easy to install in a variety of flat-panel tool locations, conveyor and load/unload cassette areas as well as within many backend semiconductor assembly and test areas.

5711-CTRL Controller

The µWire AeroBar 5711 features a controller that can be placed in a convenient location for easy access to power input (local 24 VDC or power adapter from AC wall power), ionization status lights, handheld terminal setup connection and remote status connection.

Handheld Terminal

Use the Hand held Terminal (HHT) to change the settings of the 5711 AeroBar. The HHT can also be used to monitor operation status and parameter, such as bar address, frequency, power output, standby mode, alarm test, and firmware version.

Emitter Wire Cleaner


The 5711 µWire AeroBar has a specific design emitter wire cleaner: placing foam swap inside the swap along the emitter wire, those accumulated dirts can be removed in a fast and simple way. The emitter cartridge can also be detached for replacement.