Gemini Monostation

產品查詢
The Gemini is the worldwide smaller wafer transfer system. 
Semi automatic, this machine has the smaller footprint ever seen in fab and can load and unload 25 wafers from cassette to cassette in less than 30 seconds. 

The position of the wafers (in the rear of the machine) during the transfer secures the wafers, provides a good result from contamination tests and avoids operator error with the carrier.