RWMAP – Map Driven Inspection Software System

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RWMAP is a map driven inspection system for semiconductor wafers. It is composed by a motorized microscope XY and Theta stage, an inspection camera, a control system and a state-of-the-art graphical software.


Features:

  • Motorized X/Y/R precision stage for semiconductor microscopes
  • Image acquisition system and advanced inspection software
  • Wafer map identification, dice inspection, and BINCODE modification
  • Picture storage, high-resolution measurements, and wafer scanning
  • Semi M12-M13 OCR reader, wafer identification, and powerful inspection tools
  • Sequential or direct dice access, programmed paths, and sampling strategies
  • Inspection at all process phases, from substrate control to back-end
  • Precise measurement and image documentation system
  • Configurable functions for diverse working environments
  • Compatibility with SEMI map formats and adaptable to different maps

Specifications:

  • Three axes, motorized microscope stage. X,Y and R, resolution 1m and <0.01° · PC based motion controller
  • High resolution camera
  • 23” high resolution monitor
  • Inspection modes: single die direct access, sequential scan, free, statistical sampling, programmed paths
  • User defined scan filters (all dice, only GOOD dice, only FAIL dice or bin code defined filters)
  • Complete bin code management
  • Map type according to SEMI standard, custom formats on request · Map download/upload through LAN or locally
  • Autofocus for Leica DM8000/12000 · On screen measurement functions · Optional ID OCR reader
  • Optional SECS-II HSMS and GEM interfacing