MC8, MC6 & 300mm Metal Cassettes

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Metal Cassettes offer cost effective solutions for thermal processes applications. 
Made of a special aluminum alloy (Fortal HR), they guarantee high mechanical performances with an optimized weight. A very hard and thick anodization of A1203 is grown onto the Fortal HR to prevent scratches and metal contamination.

  • High back plate for wafer protection
  • Up to 400ºC process compliant
  • Ergonomic handles for ease of use and prevent contamination
  • Minimized wafers masking
  • MC8 – Dimensions (wdh) 213 x 240 x 225 mm
  • MC6 – Dimensions (wdh) 163 x 143 x 165 mm
  • ESD Protection
  • High back plate for wafer protection
  • Up to 400ºC process compliant
  • Ergonomic handles for ease of use and prevent contamination
  • Minimized wafers masking
  • Dimensions (wdh) 412 x 312 x 339 mm
  • Weight: 5 kg
  • ESD protection
  • Infopad & clamp function available offering full compatibility with SEMI E15.1 and handling with Load Ports, PGV