FML8000 – Ring Frame Mounted Wafer Loader
製品のお問い合わせThe new FML frame mounted wafer loader is a tool intended to allow an easy and safe microscope inspection for wafers already mounted on dicing frames.
This equipment have been designed to fulfil the needs of microscope inspection and defect review. Such needs required a careful design, based on the state of the art technological solutions for both mechanics and control system.
Features:
- Frame size 150 or 200 mm – single size
- Frame design According to SEMI standards (special design on request)
- Class 100 clean room compatible
- Computer control with touch screen graphical interface
- Micro inspection
- Sequential inspection mode with possibility of direct selection
- Laser cassette mapping
- Compatible with Leica DM8000 microscope and many other brands · Footprint: W 800 x D 700 x H 650
