SIL8000 Wafer Loader

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Automatic loading system for silicon wafers, paired with other inspection microscopes. SIL8000 loader is based on a PC system with a user-friendly touchscreen interface.

Its software has recipe management to easily switch between different wafer sizes and thicknesses and features different wafer selection methods to cover any inspection need. The immediate wafer access and selection make the system extremely easy and friendly to use.


Features:
  • Optional macro inspection capability
  • Compatibility with 150 mm and 200 mm wafers without mechanical adjustments
  • Auto-recipe tool for easy cassette profile configuration
  • Default safety features: laser mapping, cross-slot detection, wafer protrusion
  • Efficient and reliable wafer handling with carbon fiber end effector
  • Optional features: LED illuminator, microscope rotating chuck with auto-zero return for carrier protection

Specifications:

Wafer Thickness • 250μm - 750 μm (Standard)
• Other thickness on request
Throughput • Up to 400 Wafers per Hour
• 200 Wafers per Hour with EE Rotation
Wafer Size • 4ʺ, 5ʺ, 6ʺ, 8ʺ
• Handles two wafer sizes on the same machine
Environment • Class ISO4 (ISO EN14644)
• CE Mark
• SEMI Standard Compliant 
Wafer Types • Silicon (Si)
• Lithium Niobate (LiNbO3)
• Gallium Arsenide (GaAs)
• Germanium (Ge)
• Sapphire (Al2O3)
• Glass
• Silicon Carbide (SiC)
• Other semiconductor Substrates
Safety Features • Cross-slot Detection
• Laser Mapping with Wafer Thickness and Distance Measurement
• Wafer Protrusion Alarm
• Faults Detec􀆟on (Electrical, Vacuum, Air) 
User Interface • Windows 7
• 8” TFT Touch Screen 
 Networking • SMB (Windows Networking)
• SECS-GEM (Option) 
Communication Ports • Ethernet
• USB 
 Footprint • 430 (W) x 650 (D) mm 
Handling • High-reliability Carbon Fiber End Effector
• Cassette laser mapping
 Options • Bright light Inspection Lamp
• Rotating Microscope Chuck
• Motorized End Effector Rotation 
Inspection Modes • All Wafers
• Selected
• Random Selected
• Statistical Mode
 Accessories • Vibration Insulated Table
• Thin Wafer Handling Kit