The use of clean organic materials, patented vacuum tip design and true ESD protection provides a unique system with the highest levels of cleanliness and safety.
All parts of Vacuum Handling System are interchangeable. They can be configured or upgraded to meet the specific end-user requirements.
- Manual solution for single wafer handling
- True ESD protection
- High impedance range (SD)
- Manufactured from clean organic materials
- Unique surface treatment provides roughness (0.3µm)
- Optical polishing of vacuum surface
- Vacuum wand normally open
- Patented raised vacuum surface to minimize contact
- Patented support ribs prevent wafer deformation
- Reinforced vacuum tube prevents vacuum loss