The Model 5635 AeroBar MP ionizing bar is specifically designed to eliminates static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 mm particles or nanoparticles) and ISO 14644 Class 1 (0.1 mm particles) cleanliness, critical for smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances.
MP technology is easy to adjust and features the ability to fine-tune voltage, frequency and balance to meet differing environmental and product sensitivity requirements. The 5635 AeroBars come with 50 mm spacing for emitters for lengths ≤600 mm for the most dense, uniform ionization coverage.
- ISO 14644-12 (0.01 µm particles) cleanliness
- Modulated pulse technology
- Excellent lateral uniformity
- Low field voltages
- Air-assist capability
- Optional software with easy-to-use interface with wide adjustability
- Alarm output signal
- Compatible with all wafer technology nodes including 14 nm and below
- Precision balance, high ion output with long-term stability
- Uniform balance across the AeroBar
- Safe placement as close as 150 mm of the wafer or reticle
- Enhanced static charge neutralization at fast automation speeds
- Fast setup and easy optimization in any environment
- Communicate to tool or facility monitoring system
|Enclosure||ABS chasis, stainless steel rails on the outside of the bar|
|1.2 H x 6.3L x 3.6W in (3.1H x 16.0L x 9.2W cm)|
The Model 5635 ionizing bar is quickly installed by simply plugging into a 24 VDC source and connecting an air line, (if air-assist is desired). Set the DIP switches for general power levels as defined in the user’s manual to activate factory settings for a base discharge performance. Users can then fine-tune the control parameters from the bar or through the easy to use software GUI for installations where optimized balance, swing voltage and discharge times are desired. An alarm connection in the Signal and Power Junction Box enables a signal output to the tool or central computer for FMS monitoring.
Power Distribution Box (optional)
The Model 5601 Power Distribution Box can be used to centralize power and software control for up to 8 MP AeroBars.
Model 5635 is designed to operate in and maintain ISO 14644-1 Class 1 cleanliness (10 particles or less per m3 for particles of 0.1 micron and larger). Model 5635 will also perform to ISO 14644-12 cleanliness (1200 particles or less per m3 (34 particles per ft3) for particles of 0.01 micron and larger) when operated at 45-50% output voltage setting and OpenJet nozzles with single crystal silicon emitters.
ISO 14644-1 (1999) establishes 9 particulate class limits. A class is met when airborne particles-per-cubic-meter (or particles-per-cubic-foot) do not exceed the class limit. The following graph summarizes the class limit lines for particles between 0.1 micron and 5 microns.
|Model 5601 Power Distribution Box, 24 VDC; powers up to 8 MP AeroBars|
|25-0540-xx||CAT-5 with RJ-45 Ethernet Cable in 6, 10, 15 ft lengths, white|
|28-6370|| Flat mounting clips. Recommended usage: 450-1150 mm, 2 clips; 1300-2050 mm,
3 clips; 2200 mm and above, 4 clips
|32-22210|| Horizontal rotatable mounting bracket. Recommended usage: 450-1150 mm, 2 clips;
1300-2050 mm, 3 clips; 2200 mm and above, 4 clips
|32-22220|| Vertical rotatable mounting bracket. Requires 2 brackets for each ionizer bar to hold
one at the top and one at the bottom
|33-5353|| Flat Mounting Clip with Active/Screw Fasteners (2) for AeroBar. Recommended
usage: 450-1150 mm, 2 clips; 1300-2050 mm, 3 clips; 2200 mm and above, 4 clips