Model 5822i Critical Environment In-tool Ionizer

Model 5822i Critical Environment In-tool Ionizer

The compact design of the Critical Environment In-tool Ionizing Blower, Model 5822i is designed to meet small-footprint ionizer requirements in automated process tools, offering exceptional performance in hard disk drive manufacturing and back-end semiconductor environments. The ionizer maintains a ±3V or better balance standard and exceptional ±1V with the optional external feedback system. An internal, automatic balance correction system ensures your target is ionized accurately, presenting significant reduction in calibration and maintenance time resulting in cost savings. A collimator installed over the fan directs precisely balanced ionized air to the target without taking up valuable room in your environment.

Features
  • ±3V or better balance (±1V with the optional external feedback system)
  • Facility Monitoring System (FMS) connection and audible alarm
  • The remote Control Box allows greater flexibility in mounting while maintaining excellent performance

Benefits

  • Directed airflow method improves ionization delivery and static elimination
  • Faster response to ionization failure with notification through tool or FMS
  • Unique, high reliability Hydro Wave1 bearing fan optimized to provide long service intervals while minimizing any particle generation