EFEM 380mm Frames


It allows automated loading of 300mm wafers mounted on 380mm frames into metrology and process chucks.


  • Compatible with main software controllers on the market
  • Single and effector
  • Barcode and RF frame ID readers
  • Backside Advanced Contact Technology
  • ISO Class 1 mini-environment
  • Leading edge cleanliness performance (particle / ion-metal / AMC)
  • SEMI standards compliant: G74 (metal tape frame), G87 (plastic tape frame)
  • 2 or 3 Load Ports configuration
  • Compatible with SEMI compliant Frame cassettes with 300mm kinematic couplings (SEMI G77), and with upcoming Frame FOUPs