Diffusion Furnace for Semiconductor Applications

TS Series V

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Applications:

  • Wafer Manufacturing
  • MEMS
  • Power Devices
  • Photonics
  • Life Science / Medtech
  • Internet of Things (loT)
  • Batteries / EV
  • Photovoltaics

  • Processes

    Model LPCVD Model ATMOSPHERIC Model PECVD  Model ALD
    Poly Wet Oxidation Nitride ARC AIOx
    P/N Doped Poly Dry Oxidation Nitride CAP -
    Nitride Annealing - -
    Low stress Nitride BBR3 - -
    TEOS POCl3 - -
    LTO Sintering - -
    SIPOS Alloy - -
    - H2 Annealing - -