Compact G5+ Series
製品のお問い合わせThe Compact G5+ series is the latest generation of COMPACT sorters from RECIF Technologies: a standard solution for 300mm silicon wafers sorting and RECIF’s flagship product.
The Compact G5+ sorter offers:
- Advanced PWP front face performance < 0.0049 @ 26nm*
- End effector: 3 points backside Advanced Contact Technology as standard configuration
- New industrial controller
- ISO Class 1 mini-environment
- SEMI300 standards compliant
- 2 or 4 Load Ports configuration
- Integration into stocker (2 or 4 LP)
- Low cost of ownership
- Standard & configurable process programs
- Compatible with all SEMI compliant FOUP/ FOSB types
- Automated hidden time mapping
- New side casing for optional handling features
* Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/FOSB type to be defined
