EFEM 380mm Frames
製品のお問い合わせIt allows automated loading of 300mm wafers mounted on 380mm frames into metrology and process chucks.
Features:
- Compatible with main software controllers on the market
- Single and effector
- Barcode and RF frame ID readers
- Backside Advanced Contact Technology
- ISO Class 1 mini-environment
- Leading edge cleanliness performance (particle / ion-metal / AMC)
- SEMI standards compliant: G74 (metal tape frame), G87 (plastic tape frame)
- 2 or 3 Load Ports configuration
- Compatible with SEMI compliant Frame cassettes with 300mm kinematic couplings (SEMI G77), and with upcoming Frame FOUPs
