- Automation is the key argument to minimize the cost of ownership.
- We provide the solution for your cells transfers reducing wafer breakage and increasing your throughput.
- Inline with your furnaces or just as a single standalone machine, the Comet CTS will transfer your wafers from cassettes to boats and back at a touch of a button.
- Available in different configurations, the Comet CTS is the best solution for your transfer needs.
|100, 125, 150, 156 mm wafer size|
|One wafer per slot or back-to-back same slot|
|Diamond or standard square wafer position|
|Compatible boat 25, 50, 100, 200, 400, 500 slots|
|Wafer presence/ absence|
|Wafer detection inside cassettes|
|Wafer detection inside boat|
|From 125 µm wafer thickness|
|Back-to-back same slot compatible|