12

12" Standalone Sorter

Standards are as follows:

  • Full SEMI Compliance
  • Full CE Compliance
  • SEMI Standard Safety
  • Dual End Effector for maximum throughput
  • Cassette Presence Indicators

Specifications
 

Specifications
From 2 to 4 load ports
Front & back scribe reading
Database recipes, manual drag & drop Gem-Secs II remote control
Compatible thin wafers, vacuum or edge contact
600 WPH cassette to cassette transfer
350 WPH with align and OCR
Class 1 cleanliness = 0.8 particles at 0.12 µm
Cassette Mapping
OCR:M12, M13 Barcode, T7
Intuitive Software User Interface: Split, Merge, Wand Functions