Compact G5+ Series

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The Compact G5+ series is the latest generation of COMPACT sorters from RECIF Technologies: a standard solution for 300mm silicon wafers sorting and RECIF’s flagship product.

The Compact G5+ sorter offers:

  • Advanced PWP front face performance < 0.0049 @ 26nm*
  • End effector: 3 points backside Advanced Contact Technology as standard configuration
  • New industrial controller
  • ISO Class 1 mini-environment
  • SEMI300 standards compliant
  • 2 or 4 Load Ports configuration
  • Integration into stocker (2 or 4 LP)
  • Low cost of ownership
  • Standard & configurable process programs
  • Compatible with all SEMI compliant FOUP/ FOSB types
  • Automated hidden time mapping
  • New side casing for optional handling features

* Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/FOSB type to be defined